Electron beam lithography (EBL) and laser beam lithography (LBL) systems

University of Jyväskylä (JYU) is inviting tenders for a combination of an electron beam lithography system (EBL) and a laser beam lithography system (LBL), both capable of mix-and-match processing based on CAD drawings in GDSII file format. We are searching a Dedicated EBL tool AND a Dedicated LBL tool for …

CPV: 38000000 Sprzęt laboratoryjny, optyczny i precyzyjny (z wyjątkiem szklanego)
Termin:
12 maja 2025 13:15
Rodzaj terminu:
Złożenie oferty
Miejsce wykonania:
Electron beam lithography (EBL) and laser beam lithography (LBL) systems
Miejsce udzielenia zamówienia:
University of Jyväskylä
Numer nagrody:
49/02.03.00.00/2025

1. Buyer

1.1 Buyer

Official name : University of Jyväskylä
Legal type of the buyer : Body governed by public law
Activity of the contracting authority : Education

2. Procedure

2.1 Procedure

Title : Electron beam lithography (EBL) and laser beam lithography (LBL) systems
Description : University of Jyväskylä (JYU) is inviting tenders for a combination of an electron beam lithography system (EBL) and a laser beam lithography system (LBL), both capable of mix-and-match processing based on CAD drawings in GDSII file format. We are searching a Dedicated EBL tool AND a Dedicated LBL tool for research and development of state of the art micro- and nano-scale features requiring high fidelity in patterning and edge smoothness. Contracting authority has a need for high precision and versatile lithography tools for patterning of optical wave guides and lattices, phononic crystals and mechanic resonators; with the goal of investigating quantum phenomena and the interplay between such structures. Contracting authority has a need for the lithography tools to support integration of high fidelity nano-scale features into considerably larger designs, such as microfluidic networks with widths of about 100 um and lengths of several mm. Therefore, contracting authority puts emphasis on the two lithography systems having good support for mix-and-match lithography, i.e. well documented procedures for sharing CAD pattern libraries for straightforward implementation in mix-and-match exposures on the same resist layer. The EBL and LBL systems should manage mix-and-match exposures with resists such as Shipley S1813, SU-8 and AZ5200-E series. Prior references of supplying comparable systems are required. Contracting authority (JYU) may suspend the procurement procedure if the price level of the tenders exceeds the budget available for the procurement
Procedure identifier : 5bae275b-d324-4d3f-9874-9ab60e898809
Internal identifier : 49/02.03.00.00/2025
Type of procedure : Open
The procedure is accelerated : no
Justification for the accelerated procedure :
Main features of the procedure : In an open procedure the contracting entity publishes a contract notice and places a call for tenders for the receivable, on which basis all prospective suppliers may submit their tenders. After the contract notice has been published and the call for tenders has been placed, the contracting entity may send the call for tenders to the suppliers that it considers suitable. A contracting entity may conclude a procurement agreement in the form of separate lots and may determine the size and subject-matter of such lots. Tenders must be submitted for both of the lots (EBL and LBL),

2.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)

2.1.2 Place of performance

Country subdivision (NUTS) : Keski-Suomi ( FI193 )
Country : Finland

2.1.4 General information

Legal basis :
Directive 2014/24/EU

2.1.5 Terms of procurement

Terms of submission :
The tenderer must submit tenders for all lots

2.1.6 Grounds for exclusion

Analogous situation like bankruptcy under national law : The economic operator is in any analogous situation like bankruptcy arising from a similar procedure under national laws and regulations.
Bankruptcy : The economic operator is bankrupt.
Corruption : The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for corruption, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.
Arrangement with creditors : The economic operator is in arrangement with creditors.
Participation in a criminal organisation : The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for participation in a criminal organisation, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.
Agreements with other economic operators aimed at distorting competition : The economic operator has entered into agreements with other economic operators aimed at distorting competition.
Breaching of obligations in the fields of environmental law : The economic operator has breached its obligations in the field of environmental law.
Money laundering or terrorist financing : The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for money laundering or terrorist financing, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.
Fraud : The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for fraud, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.
Child labour and other forms of trafficking in human beings : The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for child labour and other forms of trafficking in human beings, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.
Insolvency : The economic operator is the subject of insolvency or winding-up.
Breaching of obligations in the fields of labour law : The economic operator has breached its obligations in the field of labour law.
Assets being administered by liquidator : The assets of the economic operator are being administered by a liquidator or by the court.
Purely national exclusion grounds : Any person who is a member of the economic operator’s administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for work safety offence, working hours offence, work discrimination, extortionate work discrimination, violation of the right to organise or unauthorised use of foreign labour.
Conflict of interest due to its participation in the procurement procedure : The economic operator is aware of any conflict of interest, as indicated in national law, the relevant notice or the procurement documents due to its participation in the procurement procedure.
Direct or indirect involvement in the preparation of this procurement procedure : The economic operator or an undertaking related to it has advised the contracting authority or contracting entity or otherwise been involved in the preparation of the procurement procedure.
Guilty of grave professional misconduct : The economic operator is guilty of grave professional misconduct.
Early termination, damages or other comparable sanctions : The economic operator has experienced that a prior public contract, a prior contract with a contracting entity or a prior concession contract was terminated early, or that damages or other comparable sanctions were imposed in connection with that prior contract.
Breaching of obligations in the fields of social law : The economic operator has breached its obligations in the field of social law.
Payment of social security contributions : The economic operator has breached its obligations relating to the payment social security contributions, both in the country in which it is established and in Member State of the contracting authority or contracting entity if other than the country of establishment.
Business activities are suspended : The business activities of the economic operator are suspended.
Payment of taxes : The economic operator has breached its obligations relating to the payment of taxes, both in the country in which it is established and in Member State of the contracting authority or contracting entity if other than the country of establishment.
Terrorist offences or offences linked to terrorist activities : The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for terrorist offences or offences linked to terrorist activities, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.

5. Lot

5.1 Lot technical ID : LOT-0001

Title : EBL system
Description : A Dedicated EBL tool for fabrication of state of the art nano-scale structures. Contracting authority has a need for high precision and versatile tool which would be extremely useful in preparation of phononic and photonic structures, such as waveguides, gratings and meta-plasmonic structures. The EBL system should have good support for mix-and-match lithography, i.e. well documented procedures for sharing CAD pattern libraries for straightforward implementation in mix-and-match exposures with the LBL system in lot 2. Prior references of supplying comparable systems are required.
Internal identifier : 1

5.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)

5.1.2 Place of performance

Country : Finland
Anywhere in the given country
Additional information :

5.1.3 Estimated duration

Duration : 12 Month

5.1.6 General information

Reserved participation : Participation is not reserved.
Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA) : yes
This procurement is also suitable for small and medium-sized enterprises (SMEs) : yes

5.1.7 Strategic procurement

Social objective promoted : Human rights due diligence in global supply chains, Fair working conditions

5.1.9 Selection criteria

Criterion :
Type : Economic and financial standing
Use of this criterion : Used
Criterion :
Type : Suitability to pursue the professional activity
Use of this criterion : Not used
Criterion :
Type : Technical and professional ability
Use of this criterion : Used

5.1.10 Award criteria

Criterion :
Type : Price
Name : Hinta
Description : Tarjousten hintavertailu
Category of award threshold criterion : Weight (points, exact)
Award criterion number : 80
Criterion :
Type : Quality
Name : Laatu
Description : Tarjousten laatuvertailu
Category of award threshold criterion : Weight (points, exact)
Award criterion number : 80
Description of the method to be used if weighting cannot be expressed by criteria :
Justification for not indicating the weighting of the award criteria :

5.1.11 Procurement documents

Deadline for requesting additional information : 02/05/2025 13:15 +00:00

5.1.12 Terms of procurement

Terms of submission :
Electronic submission : Required
Languages in which tenders or requests to participate may be submitted : English
Electronic catalogue : Not allowed
Tenderers may submit more than one tender : Not allowed
Deadline for receipt of tenders : 12/05/2025 13:15 +00:00
Deadline until which the tender must remain valid : 3 Month
Information about public opening :
Opening date : 13/05/2025 07:00 +00:00
Terms of contract :
The execution of the contract must be performed within the framework of sheltered employment programmes : No
Electronic invoicing : Required
Electronic ordering will be used : no
Electronic payment will be used : yes

5.1.15 Techniques

Framework agreement :
No framework agreement
Information about the dynamic purchasing system :
No dynamic purchase system

5.1.16 Further information, mediation and review

Review organisation : Markkinaoikeus -

5.1 Lot technical ID : LOT-0002

Title : LBL system
Description : A laser beam lithography system (LBL) for advanced microfabrication of semiconductor and biomedical devices. The system will be installed in a clean-room facility of class iso 5, forming part of a larger lithography research line. The system must meet high performance specifications for resolution. The system is intended for exposure of photoresists where suitable exposure wavelength is 375 nm. The majority of processing will occur on chips sized from 5 mm by 5 mm up to standard 4 inch diameter wafers, however we require that up to 5 x 5 inch substrates can fit into the system. The LBL system should have good support for mix-and-match lithography, i.e. well documented procedures for sharing CAD pattern libraries for straightforward implementation in mix-and-match exposures with the EBL system in lot 1. The system needs to be installed by the supplier. Prior references of supplying comparable systems are required.
Internal identifier : 2.

5.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)

5.1.2 Place of performance

Country subdivision (NUTS) : Keski-Suomi ( FI193 )
Country : Finland
Additional information :

5.1.3 Estimated duration

Duration : 12 Month

5.1.6 General information

Reserved participation : Participation is not reserved.
Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA) : yes
This procurement is also suitable for small and medium-sized enterprises (SMEs) : yes

5.1.7 Strategic procurement

Social objective promoted : Human rights due diligence in global supply chains, Fair working conditions

5.1.9 Selection criteria

Criterion :
Type : Economic and financial standing
Use of this criterion : Used
Criterion :
Type : Suitability to pursue the professional activity
Use of this criterion : Not used
Criterion :
Type : Technical and professional ability
Use of this criterion : Used

5.1.10 Award criteria

Criterion :
Type : Price
Name : Hinta
Description : Tarjousten hintavertailu
Category of award threshold criterion : Weight (points, exact)
Award criterion number : 80
Criterion :
Type : Quality
Name : Laatu
Description : Tarjousten laatuvertailu
Category of award threshold criterion : Weight (points, exact)
Award criterion number : 20
Description of the method to be used if weighting cannot be expressed by criteria :
Justification for not indicating the weighting of the award criteria :

5.1.11 Procurement documents

Deadline for requesting additional information : 02/05/2025 13:15 +00:00

5.1.12 Terms of procurement

Terms of submission :
Electronic submission : Required
Languages in which tenders or requests to participate may be submitted : English
Electronic catalogue : Not allowed
Tenderers may submit more than one tender : Not allowed
Deadline for receipt of tenders : 12/05/2025 13:15 +00:00
Deadline until which the tender must remain valid : 3 Month
Information about public opening :
Opening date : 13/05/2025 07:00 +00:00
Terms of contract :
The execution of the contract must be performed within the framework of sheltered employment programmes : No
Electronic invoicing : Required
Electronic ordering will be used : no
Electronic payment will be used : yes

5.1.15 Techniques

Framework agreement :
No framework agreement
Information about the dynamic purchasing system :
No dynamic purchase system

5.1.16 Further information, mediation and review

Review organisation : Markkinaoikeus -

8. Organisations

8.1 ORG-0001

Official name : Markkinaoikeus
Registration number : 3006157-6
Postal address : Radanrakentajantie 5
Town : Helsinki
Postcode : 00520
Country subdivision (NUTS) : Helsinki-Uusimaa ( FI1B1 )
Country : Finland
Telephone : +358 295643300
Roles of this organisation :
Review organisation

8.1 ORG-0002

Official name : University of Jyväskylä
Registration number : 0245894-7
Postal address : Seminaarinkatu 15
Town : Jyväskylän yliopisto
Postcode : 40014
Country subdivision (NUTS) : Keski-Suomi ( FI193 )
Country : Finland
Contact point : Hankintapalvelut
Telephone : +358 0142601211
Internet address : http://www.jyu.fi
Roles of this organisation :
Buyer

8.1 ORG-0003

Official name : Hansel Oy (Hilma)
Registration number : FI09880841
Postal address : Mannerheiminaukio 1a
Town : Helsinki
Postcode : 00100
Country subdivision (NUTS) : Helsinki-Uusimaa ( FI1B1 )
Country : Finland
Contact point : eSender
Telephone : 029 55 636 30
Roles of this organisation :
TED eSender
Notice information
Notice identifier/version : a0d4c2fb-1d0f-48cd-bc38-4d798b381b2c - 01
Form type : Competition
Notice type : Contract or concession notice – standard regime
Notice dispatch date : 08/04/2025 08:43 +00:00
Notice dispatch date (eSender) : 08/04/2025 08:44 +00:00
Languages in which this notice is officially available : English
Notice publication number : 00230844-2025
OJ S issue number : 70/2025
Publication date : 09/04/2025