Spectroscopic ellipsometer

This tender is for the acquisition of a spectroscopic ellipsometer intended for a university facility, which provides access to an extensive suite of characterization tools as one of its core purposes. The facility caters to users from various levels of experience and technical backgrounds within the university and serves commercial …

CPV: 38000000 Equipo de laboratorio, óptico y de precisión (excepto gafas), 38400000 Instrumentos de medida o control de características físicas, 38600000 Instrumentos ópticos, 38900000 Instrumentos de evaluación o ensayo diversos
Lugar de ejecución:
Spectroscopic ellipsometer
Organismo adjudicador:
Danmarks Tekniske Universitet - DTU
Número de premio:
9158

1. Buyer

1.1 Buyer

Official name : Danmarks Tekniske Universitet - DTU
Legal type of the buyer : Body governed by public law
Activity of the contracting authority : Education

2. Procedure

2.1 Procedure

Title : Spectroscopic ellipsometer
Description : This tender is for the acquisition of a spectroscopic ellipsometer intended for a university facility, which provides access to an extensive suite of characterization tools as one of its core purposes. The facility caters to users from various levels of experience and technical backgrounds within the university and serves commercial customers as well. The user community today is more than 100. The instrument is to replace an existing tool so we need to make sure that the new system can at least meet the specifications of the old one which is reflected in the specified technical requirements. We have a broad user base for the instrument ranging from users that just need to measure the thickness of a dielectric thin film on a silicon substrate to more advanced users working on developing new materials for micro and nanofabrication with specific optical properties. Therefore, we need a state-of-the-art instrument that can meet all current and future needs for ellipsometry from our users. We will have a large number of users on the system so it is important that the system is user-friendly so that time for user training can be limited and the threshold for using the equipment is low. Already today our current ellipsometer is heavily used and becoming a bottleneck, so it is very important that measurements on the future system are fast, both for single measurements and wafer mapping measurements. To limit the users time at the instrument it is also very important that all users have the possibility to have access to the analysis software from their own desk.
Procedure identifier : 64775969-1154-4498-9f3e-3d43b2e3e33b
Previous notice : 8a2d3b89-eb72-4cd8-9e5b-543cae2e5f25-01
Internal identifier : 9158
Type of procedure : Open
The procedure is accelerated : no
Justification for the accelerated procedure :
Main features of the procedure :

2.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)
Additional classification ( cpv ): 38400000 Instruments for checking physical characteristics
Additional classification ( cpv ): 38600000 Optical instruments
Additional classification ( cpv ): 38900000 Miscellaneous evaluation or testing instruments

2.1.2 Place of performance

Anywhere

2.1.3 Value

Estimated value excluding VAT : 250 000 Euro

2.1.4 General information

Call for competition is terminated
Legal basis :
Directive 2014/24/EU

5. Lot

5.1 Lot technical ID : LOT-0000

Title : Spectroscopic ellipsometer
Description : This tender is for the acquisition of a spectroscopic ellipsometer intended for a university facility, which provides access to an extensive suite of characterization tools as one of its core purposes. The facility caters to users from various levels of experience and technical backgrounds within the university and serves commercial customers as well. The user community today is more than 100. The instrument is to replace an existing tool so we need to make sure that the new system can at least meet the specifications of the old one which is reflected in the specified technical requirements. We have a broad user base for the instrument ranging from users that just need to measure the thickness of a dielectric thin film on a silicon substrate to more advanced users working on developing new materials for micro and nanofabrication with specific optical properties. Therefore, we need a state-of-the-art instrument that can meet all current and future needs for ellipsometry from our users. We will have a large number of users on the system so it is important that the system is user-friendly so that time for user training can be limited and the threshold for using the equipment is low. Already today our current ellipsometer is heavily used and becoming a bottleneck, so it is very important that measurements on the future system are fast, both for single measurements and wafer mapping measurements. To limit the users time at the instrument it is also very important that all users have the possibility to have access to the analysis software from their own desk.
Internal identifier : 9158

5.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)
Additional classification ( cpv ): 38400000 Instruments for checking physical characteristics
Additional classification ( cpv ): 38600000 Optical instruments
Additional classification ( cpv ): 38900000 Miscellaneous evaluation or testing instruments
Options :
Description of the options : Minimum option: The stage may be able to rotate or an extra stage will be included that can rotate to be used for anisotropic samples.

5.1.2 Place of performance

Anywhere
Additional information :

5.1.3 Estimated duration

Start date : 05/12/2024
Duration end date : 05/12/2025

5.1.5 Value

Estimated value excluding VAT : 250 000 Euro

5.1.6 General information

Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA) : yes

5.1.10 Award criteria

Criterion :
Type : Price
Name : Price
Description : The lower price the better.
Weight (percentage, exact) : 20
Criterion :
Type : Quality
Name : Quality and functionality
Description : The better fulfillment of the evaluation requirements in Appendix 1 - Requirement Specification the better.
Weight (percentage, exact) : 80
Description of the method to be used if weighting cannot be expressed by criteria :
Justification for not indicating the weighting of the award criteria :

5.1.12 Terms of procurement

Information about review deadlines : Complaint regarding award of contract: Complaint regarding the award of a contract must be submitted no later than 45 calendar days from the date after the Contracting Authority has published a notice in the European Union Official Journal informing that the Contracting Authority has awarded/concluded a contract, cf. lov om Klagenævnet for Udbud (Complaints Board for Tenders) § 7, Section 2, no. 1.

5.1.15 Techniques

Framework agreement :
No framework agreement
Information about the dynamic purchasing system :
No dynamic purchase system

5.1.16 Further information, mediation and review

Review organisation : Klagenævnet for Udbud
Organisation providing more information on the review procedures : Konkurrence- og Forbrugerstyrelsen
Organisation whose budget is used to pay for the contract : Danmarks Tekniske Universitet - DTU
Organisation executing the payment : Danmarks Tekniske Universitet - DTU
TED eSender : Mercell Holding ASA

6. Results

Value of all contracts awarded in this notice : 268 123 Euro

6.1 Result lot ldentifier : LOT-0000

At least one winner was chosen.

6.1.2 Information about winners

Winner :
Official name : Quantum Design
Tender :
Tender identifier : Spectroscopic ellipsometer - Quantum Design
Identifier of lot or group of lots : LOT-0000
Value of the tender : 268 123 Euro
The tender was ranked : no
The tender is a variant : no
Contract information :
Identifier of the contract : Spectroscopic ellipsometer - Quantum Design
Date of the conclusion of the contract : 05/12/2024
The contract is awarded within a framework agreement : no

6.1.4 Statistical information

Received tenders or requests to participate :
Type of received submissions : Tenders
Number of tenders or requests to participate received : 2

8. Organisations

8.1 ORG-0001

Official name : Danmarks Tekniske Universitet - DTU
Registration number : 30060946
Postal address : Anker Engelunds Vej 1
Town : Kgs. Lyngby
Postcode : 2800
Country subdivision (NUTS) : Københavns omegn ( DK012 )
Country : Denmark
Contact point : David Fajnzylber
Telephone : +45 93596840
Internet address : https://www.dtu.dk
Roles of this organisation :
Buyer
Organisation whose budget is used to pay for the contract
Organisation executing the payment

8.1 ORG-0002

Official name : Klagenævnet for Udbud
Registration number : 37795526
Postal address : Nævnenes hus, Toldboden 2
Town : Viborg
Postcode : 8800
Country subdivision (NUTS) : Østjylland ( DK042 )
Country : Denmark
Telephone : +45 35291000
Internet address : http://www.kfst.dk/
Roles of this organisation :
Review organisation

8.1 ORG-0003

Official name : Konkurrence- og Forbrugerstyrelsen
Registration number : 10294819
Postal address : Carl Jacobsens Vej 35
Town : Valby
Postcode : 2500
Country subdivision (NUTS) : Byen København ( DK011 )
Country : Denmark
Telephone : +45 41715000
Internet address : http://www.kfst.dk
Roles of this organisation :
Organisation providing more information on the review procedures

8.1 ORG-0004

Official name : Quantum Design
Registration number : DE284734472
Postal address : Breitwieserweg 9
Town : Phungstadt
Postcode : 64319
Country subdivision (NUTS) : Mainz, Kreisfreie Stadt ( DEB35 )
Country : Germany
Telephone : +46 841071791
Roles of this organisation :
Tenderer
Winner of these lots : LOT-0000

8.1 ORG-0005

Official name : Mercell Holding ASA
Registration number : 980921565
Postal address : Askekroken 11
Town : Oslo
Postcode : 0277
Country subdivision (NUTS) : Oslo ( NO081 )
Country : Norway
Contact point : eSender
Telephone : +47 21018800
Fax : +47 21018801
Internet address : http://mercell.com/
Roles of this organisation :
TED eSender

11. Notice information

11.1 Notice information

Notice identifier/version : 75a497c1-9689-41ff-b6e9-727f78b06c25 - 01
Form type : Result
Notice type : Contract or concession award notice – standard regime
Notice dispatch date : 18/12/2024 10:32 +00:00
Notice dispatch date (eSender) : 18/12/2024 11:00 +00:00
Languages in which this notice is officially available : English

11.2 Publication information

Notice publication number : 00779218-2024
OJ S issue number : 247/2024
Publication date : 19/12/2024