Atomic layer – chemical vapour deposition (ALD-CVD) cluster tool

KTH is seeking tenders for an atomic layer – chemical vapour deposition (ALD-CVD) cluster tool for exploratory fundamental research into a wide range of materials and applications. The tool will enable combinations of 2D and thin films with ultra-clean interfaces and atomic-level thickness accuracy. KTH is seeking tenders for an …

CPV: 31712000 Maquinaria, aparatos y microsistemas microelectrónicos
Lugar de ejecución:
Atomic layer – chemical vapour deposition (ALD-CVD) cluster tool
Organismo adjudicador:
Kungliga Tekniska högskolan
Número de premio:
V-2024-0480

1. Buyer

1.1 Buyer

Official name : Kungliga Tekniska högskolan
Legal type of the buyer : Central government authority
Activity of the contracting authority : Education

2. Procedure

2.1 Procedure

Title : Atomic layer – chemical vapour deposition (ALD-CVD) cluster tool
Description : KTH is seeking tenders for an atomic layer – chemical vapour deposition (ALD-CVD) cluster tool for exploratory fundamental research into a wide range of materials and applications. The tool will enable combinations of 2D and thin films with ultra-clean interfaces and atomic-level thickness accuracy.
Procedure identifier : 1572be17-6207-4b8f-875a-be5a0307d42c
Previous notice : 3d0bb892-a972-47e5-94da-29b6855f1de3-01
Internal identifier : V-2024-0480
Type of procedure : Open
The procedure is accelerated : no
Justification for the accelerated procedure :
Main features of the procedure :

2.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 31712000 Microelectronic machinery and apparatus and microsystems

2.1.2 Place of performance

Country subdivision (NUTS) : Stockholms län ( SE110 )
Country : Sweden

2.1.3 Value

Estimated value excluding VAT : 1 800 000 Euro

2.1.4 General information

Legal basis :
Directive 2014/24/EU

5. Lot

5.1 Lot technical ID : LOT-0000

Title : ALD-CVD
Description : KTH is seeking tenders for an atomic layer – chemical vapour deposition (ALD-CVD) cluster tool for exploratory fundamental research into a wide range of materials and applications. The tool will enable combinations of 2D and thin films with ultra-clean interfaces and atomic-level thickness accuracy.
Internal identifier : V-2024-0480

5.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 31712000 Microelectronic machinery and apparatus and microsystems

5.1.2 Place of performance

Country subdivision (NUTS) : Stockholms län ( SE110 )
Country : Sweden
Additional information :

5.1.3 Estimated duration

Duration : 2 Year

5.1.5 Value

Estimated value excluding VAT : 1 800 000 Euro

5.1.6 General information

Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA) : no

5.1.7 Strategic procurement

Aim of strategic procurement : Innovative purchase

5.1.10 Award criteria

Criterion :
Type : Price
Name :
Description :
Description of the method to be used if weighting cannot be expressed by criteria :
Justification for not indicating the weighting of the award criteria :

5.1.15 Techniques

Framework agreement :
No framework agreement
Information about the dynamic purchasing system :
No dynamic purchase system

5.1.16 Further information, mediation and review

Review organisation : Förvaltningsrätten i Stockholm
Organisation signing the contract : Kungliga Tekniska högskolan

6. Results

Value of all contracts awarded in this notice : 1 588 099 Euro

6.1 Result lot ldentifier : LOT-0000

At least one winner was chosen.

6.1.2 Information about winners

Winner :
Official name : Oxford Instruments GmbH
Tender :
Tender identifier : PlasmaPro ASP and PlasmaPro100 ICPCVD
Identifier of lot or group of lots : LOT-0000
Subcontracting : Not yet known
Subcontracting value is known : no
Subcontracting percentage is known : no
Contract information :
Identifier of the contract : -
Title : ALD-CVD-Oxford Instruments GmbH
Date on which the winner was chosen : 29/08/2024
The contract is awarded within a framework agreement : no
Organisation signing the contract : Kungliga Tekniska högskolan

6.1.3 Non-winning tenderers :

Tenderer :
Official name : plasway-Technologies GmbH

6.1.4 Statistical information

Received tenders or requests to participate :
Type of received submissions : Tenders from tenderers registered in other European Economic Area countries than the country of the buyer
Number of tenders or requests to participate received : 2

8. Organisations

8.1 ORG-0001

Official name : Kungliga Tekniska högskolan
Registration number : 2021003054
Department : Upphandlingsgruppen/VS
Postal address : Brinellvägen 8
Town : STOCKHOLM
Postcode : 100 44
Country subdivision (NUTS) : Stockholms län ( SE110 )
Country : Sweden
Contact point : Karin Edoff
Telephone : +46 87906000
Internet address : http://www.kth.se
Roles of this organisation :
Buyer
Organisation signing the contract

8.1 ORG-0002

Official name : Förvaltningsrätten i Stockholm
Registration number : 202100-2742
Town : Stockholm
Postcode : 115 76
Country subdivision (NUTS) : Stockholms län ( SE110 )
Country : Sweden
Telephone : 08-561 680 00
Roles of this organisation :
Review organisation

8.1 ORG-0003

Official name : Oxford Instruments GmbH
Registration number : 21599
Department : Försäljning
Postal address : Borsigstrasse 15a
Town : Wiesbaden
Postcode : 65205
Country subdivision (NUTS) : Wiesbaden, Kreisfreie Stadt ( DE714 )
Country : Germany
Contact point : Michael Stokeley
Telephone : +49 (0) 6122 937 161
Roles of this organisation :
Tenderer
Winner of these lots : LOT-0000

8.1 ORG-0004

Official name : plasway-Technologies GmbH
Registration number : 34990
Department : Sales
Postal address : Heinrich Heine Str. 2b
Town : Bannewitz
Postcode : 01728
Country subdivision (NUTS) : Dresden, Kreisfreie Stadt ( DED21 )
Country : Germany
Contact point : Linda Sixt
Telephone : +49(0)15901261139
Roles of this organisation :
Tenderer

11. Notice information

11.1 Notice information

Notice identifier/version : c9503bc0-aee2-48b4-9a8f-c5344dad20df - 01
Form type : Result
Notice type : Contract or concession award notice – standard regime
Notice dispatch date : 25/11/2024 15:27 +00:00
Notice dispatch date (eSender) : 25/11/2024 15:27 +00:00
Languages in which this notice is officially available : English

11.2 Publication information

Notice publication number : 00723714-2024
OJ S issue number : 231/2024
Publication date : 27/11/2024