200 mm coating and developing track tool

THE OBJECT OF THE TENDER PROCESS The object of the tender process is 200 mm coating and developing track tool (later also “track tool” or “Tool”) for the VTT Micronova cleanroom semiconductor front end. The procurement involves a single cassette-to cassette tool with spin coating and developing stations and hot …

CPV: 38000000 Laboratory, optical and precision equipments (excl. glasses)
Deadline:
April 29, 2025, 9 a.m.
Deadline type:
Submitting a bid
Place of execution:
200 mm coating and developing track tool
Awarding body:
VTT Technical Research Centre of Finland Ltd
Award number:
VTT 24/206/2025

1. Buyer

1.1 Buyer

Official name : VTT Technical Research Centre of Finland Ltd
Legal type of the buyer : Public undertaking
Activity of the contracting authority : Economic affairs

2. Procedure

2.1 Procedure

Title : 200 mm coating and developing track tool
Description : THE OBJECT OF THE TENDER PROCESS The object of the tender process is 200 mm coating and developing track tool (later also “track tool” or “Tool”) for the VTT Micronova cleanroom semiconductor front end. The procurement involves a single cassette-to cassette tool with spin coating and developing stations and hot and cool plates. The coating and developing track tool is intended to support silicon semiconductor front end processing of 200 mm wafers, facilitating exposure by stepper or automated mask aligner. The technical specification of the object of the tender is described in more detail in this Annex 1 of the invitation to tender. The Tool must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1. A tender which does not meet one or more of the requirements specified in the Annex 1 and Annex 2, may be rejected for failing to comply with the call for tenders. The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 100 % price weighting . A reference price has to be given for the equipment that meets all the requirements set in the invitation to tender, especially its Annex 1. The object of the tender process is described in more detail in the invitation to tender documents. Partial tenders will not be accepted. OPTIONS (mandatory) The following are mandatory options (to be offered): - Maintenance contract (See section Maintenance contract option), - Additional warranty (+ 12 months) (See section Additional warranty) VTT does not commit to purchase the options. The price(s) of the option(s) are not taken into account when comparing tenders.
Procedure identifier : b24e329f-4f1c-4c91-ad60-895adf318cdb
Internal identifier : VTT 24/206/2025
Type of procedure : Open
The procedure is accelerated : no
Justification for the accelerated procedure :
Main features of the procedure : The tender process is based on the open procedure applicable to contracts that exceed the EU procurement threshold.

2.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)

2.1.2 Place of performance

Postal address : Tekniikantie 17
Town : Espoo
Postcode : 02150
Country subdivision (NUTS) : Helsinki-Uusimaa ( FI1B1 )
Country : Finland

2.1.4 General information

Additional information : The object of the tender process is described in more detail in the invitation to tender documents.
Legal basis :
Directive 2014/24/EU

2.1.6 Grounds for exclusion

Analogous situation like bankruptcy under national law : The economic operator is in any analogous situation like bankruptcy arising from a similar procedure under national laws and regulations.
Bankruptcy : The economic operator is bankrupt.
Corruption : The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for corruption, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.
Arrangement with creditors : The economic operator is in arrangement with creditors.
Participation in a criminal organisation : The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for participation in a criminal organisation, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.
Agreements with other economic operators aimed at distorting competition : The economic operator has entered into agreements with other economic operators aimed at distorting competition.
Breaching of obligations in the fields of environmental law : The economic operator has breached its obligations in the field of environmental law.
Money laundering or terrorist financing : The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for money laundering or terrorist financing, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.
Fraud : The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for fraud, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.
Child labour and other forms of trafficking in human beings : The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for child labour and other forms of trafficking in human beings, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.
Insolvency : The economic operator is the subject of insolvency or winding-up.
Breaching of obligations in the fields of labour law : The economic operator has breached its obligations in the field of labour law.
Assets being administered by liquidator : The assets of the economic operator are being administered by a liquidator or by the court.
Purely national exclusion grounds : Any person who is a member of the economic operator’s administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for work safety offence, working hours offence, work discrimination, extortionate work discrimination, violation of the right to organise or unauthorised use of foreign labour.
Conflict of interest due to its participation in the procurement procedure : The economic operator is aware of any conflict of interest, as indicated in national law, the relevant notice or the procurement documents due to its participation in the procurement procedure.
Direct or indirect involvement in the preparation of this procurement procedure : The economic operator or an undertaking related to it has advised the contracting authority or contracting entity or otherwise been involved in the preparation of the procurement procedure.
Guilty of grave professional misconduct : The economic operator is guilty of grave professional misconduct.
Early termination, damages or other comparable sanctions : The economic operator has experienced that a prior public contract, a prior contract with a contracting entity or a prior concession contract was terminated early, or that damages or other comparable sanctions were imposed in connection with that prior contract.
Breaching of obligations in the fields of social law : The economic operator has breached its obligations in the field of social law.
Payment of social security contributions : The economic operator has breached its obligations relating to the payment social security contributions, both in the country in which it is established and in Member State of the contracting authority or contracting entity if other than the country of establishment.
Business activities are suspended : The business activities of the economic operator are suspended.
Payment of taxes : The economic operator has breached its obligations relating to the payment of taxes, both in the country in which it is established and in Member State of the contracting authority or contracting entity if other than the country of establishment.
Terrorist offences or offences linked to terrorist activities : The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for terrorist offences or offences linked to terrorist activities, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.

5. Lot

5.1 Lot technical ID : LOT-0000

Title : 200 mm coating and developing track tool
Description : THE OBJECT OF THE TENDER PROCESS The object of the tender process is 200 mm coating and developing track tool (later also “track tool” or “Tool”) for the VTT Micronova cleanroom semiconductor front end. The procurement involves a single cassette-to cassette tool with spin coating and developing stations and hot and cool plates. The coating and developing track tool is intended to support silicon semiconductor front end processing of 200 mm wafers, facilitating exposure by stepper or automated mask aligner. The technical specification of the object of the tender is described in more detail in this Annex 1 of the invitation to tender. The Tool must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1. A tender which does not meet one or more of the requirements specified in the Annex 1 and Annex 2, may be rejected for failing to comply with the call for tenders. The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 100 % price weighting . A reference price has to be given for the equipment that meets all the requirements set in the invitation to tender, especially its Annex 1. The object of the tender process is described in more detail in the invitation to tender documents. Partial tenders will not be accepted. OPTIONS (mandatory) The following are mandatory options (to be offered): - Maintenance contract (See section Maintenance contract option), - Additional warranty (+ 12 months) (See section Additional warranty) VTT does not commit to purchase the options. The price(s) of the option(s) are not taken into account when comparing tenders.
Internal identifier : VTT 24/206/2025

5.1.1 Purpose

Main nature of the contract : Supplies
Main classification ( cpv ): 38000000 Laboratory, optical and precision equipments (excl. glasses)

5.1.2 Place of performance

Postal address : Tekniikantie 17
Town : Espoo
Postcode : 02150
Country subdivision (NUTS) : Helsinki-Uusimaa ( FI1B1 )
Country : Finland
Additional information :

5.1.3 Estimated duration

Duration : 12 Month

5.1.6 General information

Reserved participation : Participation is not reserved.
Procurement Project not financed with EU Funds.
The procurement is covered by the Government Procurement Agreement (GPA) : yes
This procurement is also suitable for small and medium-sized enterprises (SMEs) : yes
Additional information : The object of the tender process is described in more detail in the invitation to tender documents.

5.1.7 Strategic procurement

Social objective promoted : Human rights due diligence in global supply chains

5.1.9 Selection criteria

Criterion :
Type : Economic and financial standing
Description : See ESPD -form
Use of this criterion : Used
Criterion :
Type : Suitability to pursue the professional activity
Description : See ESPD -form
Use of this criterion : Used
Criterion :
Type : Technical and professional ability
Description : See ESPD -form and Annex 5 (References)
Use of this criterion : Used

5.1.10 Award criteria

Criterion :
Type : Price
Name : Price 100 %
Description : See call for tenders
Category of award threshold criterion : Weight (points, exact)
Award criterion number : 100
Description of the method to be used if weighting cannot be expressed by criteria :
Justification for not indicating the weighting of the award criteria :

5.1.11 Procurement documents

Languages in which the procurement documents are officially available : English
Deadline for requesting additional information : 09/04/2025 09:00 +00:00

5.1.12 Terms of procurement

Terms of submission :
Electronic submission : Required
Languages in which tenders or requests to participate may be submitted : English
Electronic catalogue : Not allowed
Variants : Not allowed
Tenderers may submit more than one tender : Not allowed
Deadline for receipt of tenders : 29/04/2025 09:00 +00:00
Deadline until which the tender must remain valid : 6 Month
Information about public opening :
Opening date : 29/04/2025 09:10 +00:00
Terms of contract :
The execution of the contract must be performed within the framework of sheltered employment programmes : No
A non-disclosure agreement is required : no
Electronic invoicing : Required
Electronic ordering will be used : yes
Electronic payment will be used : yes

5.1.15 Techniques

Framework agreement :
No framework agreement
Information about the dynamic purchasing system :
No dynamic purchase system

5.1.16 Further information, mediation and review

Review organisation : Markkinaoikeus -
Organisation providing additional information about the procurement procedure : VTT Technical Research Centre of Finland Ltd -
Organisation providing offline access to the procurement documents : VTT Technical Research Centre of Finland Ltd -
Organisation providing more information on the review procedures : VTT Technical Research Centre of Finland Ltd -
Organisation receiving requests to participate : VTT Technical Research Centre of Finland Ltd -
Organisation processing tenders : VTT Technical Research Centre of Finland Ltd -

8. Organisations

8.1 ORG-0001

Official name : Markkinaoikeus
Registration number : 3006157-6
Postal address : Radanrakentajantie 5
Town : Helsinki
Postcode : 00520
Country subdivision (NUTS) : Helsinki-Uusimaa ( FI1B1 )
Country : Finland
Telephone : +358 295643300
Roles of this organisation :
Review organisation

8.1 ORG-0002

Official name : VTT Technical Research Centre of Finland Ltd
Registration number : 2647375-4
Postal address : P.O. Box 1000, VTT
Town : Espoo
Postcode : 02044
Country subdivision (NUTS) : Helsinki-Uusimaa ( FI1B1 )
Country : Finland
Contact point : VTT Technical Research Centre of Finland Ltd
Telephone : +358 20722111
Roles of this organisation :
Buyer
Organisation providing additional information about the procurement procedure
Organisation providing offline access to the procurement documents
Organisation receiving requests to participate
Organisation processing tenders
Organisation providing more information on the review procedures

8.1 ORG-0003

Official name : Hansel Oy (Hilma)
Registration number : FI09880841
Postal address : Mannerheiminaukio 1a
Town : Helsinki
Postcode : 00100
Country subdivision (NUTS) : Helsinki-Uusimaa ( FI1B1 )
Country : Finland
Contact point : eSender
Telephone : 029 55 636 30
Roles of this organisation :
TED eSender
Notice information
Notice identifier/version : 85164965-3da4-49be-aea8-c30838a4d87e - 01
Form type : Competition
Notice type : Contract or concession notice – standard regime
Notice dispatch date : 28/03/2025 10:11 +00:00
Notice dispatch date (eSender) : 28/03/2025 10:11 +00:00
Languages in which this notice is officially available : English
Notice publication number : 00203470-2025
OJ S issue number : 63/2025
Publication date : 31/03/2025